Reducing greenhouse gas emissions from production sites

STMicroelectronics is installing abatement systems in its production sites to reduce perfluorinated compounds emissions (PFCs), which account for most of the company’s direct emissions.

Main project's drivers for reducing the greenhouse gas (GHG) emissions

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Energy and resource efficiency

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Energy Decarbonisation

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Energy efficiency improvements

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Improving efficiency in non-energy resources

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Emission removal

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Financing low-carbon issuers or disinvestment from carbon assets

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Reduction of other greenhouse gases emission

Project objectives

Reduce the direct emissions from ST’s production sites by lowering PFC gas emissions, which account for most of the direct gas emissions in the semiconductor industry.

This project is part of the carbon neutrality program goals for 2027, which was publicly announced by ST. Find out more at : It also contributes to the Science Based Targets  objectives of reducing ST’s carbon emissions by 50% between 2018 and 2025. Read more:

Detailed project description

To this end, ST has set up PFC abatement systems to treat emissions from the equipment used to etch integrated circuits on silicon.

These systems ensure that molecules with a high global warming potential undergo thermal cracking, before being neutralized by physicochemical washing. The objective is to treat 100% of the PFC gases generated during specific industrial processes at the output of each piece of equipment concerned.

Emission scope(s)

on which the project has a significant impact

Scope 1

Direct emissions generated by the company's activity.

Scope 2

Indirect emissions associated with the company's electricity and heat consumption.

Scope 3

Emissions induced (upstream or downstream) by the company's activities, products and/or services in its value chain.

Emission Removal

Carbon sinks creation, (BECCS, CCU/S, …)

Avoided Emissions

Emissions avoided by the activities, products and/or services in charge of the project, or by the financing of emission reduction projects.

Scope 1 – Neutralization of PFCs

  • Quantification: 16,500 t CO2/year

The investment project for abatement systems over the period 2021-2025 in France will reduce GHG emissions by 16,500 tCO2/year in France.

This number is the result of complex calculations that depend on the GHG protocol formulas for the use of PFCs in the semiconductor industry.

Key points

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Invested amount

Further details will be provided in the near future.

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Starting date of the project

September 2020

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Project localisation

Crolles (Isère), Rousset (Bouches du Rhône), Tours (Indre et Loire)

Project maturity level

Prototype laboratory test (TRL 7)

Real life testing (TRL 7-8)

Pre-commercial prototype (TRL 9)

Small-scale implementation

Medium to large scale implementation

Economic profitability of the project (ROI)

Short term (0-3 years)

Middle term (4-10 years)

Long term (> 10 years)

Illustrations of the project

Reducing PFC emissions in the semiconductor industry contributes to the following Sustainable Development Goals (SDG):

  • SDG 9 Industry, Innovation, and Infrastructure: lower GHGs emissions in the manufacturing process of integrated circuits.
  • SDG 12 Responsible Consumption and Production: lower GHGs emissions in the manufacturing process of integrated circuits.
  • SDG 13 Climate Action: lower GHGs emissions in the manufacturing process of integrated circuits.

Additional projects planned in Europe and Asia.

This initiative is in keeping with the Paris Climate Agreement, the French Business Climate Pledge, and STMicroelectronics’ carbon neutrality approach

To reach the goals of the program, STMicroelectronics has engaged in partnerships with:

  • Suppliers of abatement systems.
  • Local sub-contractors related to infrastructures.
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Contact the company carrying the project

STM’s other projects :